FAQ Motorized Stage

◆ When using our recommended stepping motor controller (DS102 / 112)
[Operation with the handy terminal]
1) Motorized stage
2) Cable to connect between stage and controller
3) Handy terminal (DT100)

[Operation with PC]
1) Motorized stage
2) Cable to connect between stage and controller
3) Cable to connect PC and controller (RS232C cable or USB cable)

* When using a publicly available product of RS232C : D100-R9-2,
USB : DS100-USB-1.8 RS232C cable,
it is necessary to check the connection (cross cable)

To control 4 axes, 2 of our controllers are required.
Connect the controllers with a dedicated link cable (model : DS100-LINK2-0.5).
Only one handy terminal is required, since commands to the controller are issued only to the controller set as the master unit.

The instruction manual can be downloaded from the web site of Suruga Seiki.

In principle, all the drawings of stages show when carriages are in the center of the travel ranges.

◆ Motorized Stage
The travel range represents the full travel length.
For example, in the case of 100 mm, centering on the position shown in the trace diagram,
the stage move 50mm in positive direction (CW) and 50mm in negative direction (CCW)

◆ Manual Stage
The travel range is indicated by +/- from the center. For example, in the case of +/-10mm,
centering on the position shown in the trace diagram, the stage move 10mm in negative direction and 10mm in positive direction(* full travel length is 20mm)

[exception]
There is an exception in manual Z-axis stages.
In that case, rather than showing travel range by +/- , it shows travel range in each of positive and negative directions.

It is equivalent to general dimension torelance midium grade, against the height of main body excluding motor (20mm).

Although it is described as φ8 mm, in fact, the diameter of stage carriage is φ8.2 and that of the main body section is φ8mm.
Also, the central axis of the transmission hole is not aligned with the transmission hole on the stage carriage.
Therefore, the diameter of the stage carriage is larger than the reference transmission hole.

The specifications of each product are based on the conditions when installed on a flat surface.
Because the load applied to the stage guide changes, it is not possible to clearly define the load capacity when mounting with upside down.
However, we are showing the following informaiton only for reference.

◆ Possible to use if the load point is directly below the stage carrier (center).
The load capacity shall be less than one third (1/3) of the horizontal load capacity.
* When load is applied to outside of the stage carriage, it is impossible to determine standard load capacity, and use is not recommended.
・X-axis stages
・Horitontal-plane Z-axis stages
・Goniometer stages
・Motorized rotary stages : KRW, KS402 Series

◆ Upside down use is not recommended
・Motorized rotary stage : KS451, KRE04360/06360 series, KS421 series (discontinued)
・Z-axis stage : KZS series

■ X-axis stages:
If there is a model of Z-axis stage with bracket attached to the stage, please refer to the load capacity of that stage . (Example : PG413-L24AG → PZG413-L05AG)

■ Other products:
The specifications of each product are based on the conditions when installed on a flat surface.
Because the load applied to the stage guide changes, it is not possible to clearly define the load capacity when mounting with upside down.
However, we are showing the following informaiton only for reference.

◆ Possible to use if the load point is directly below the stage carrier (center).
The load capacity shall be less than one third (1/3) of the horizontal load capacity.
* When load is applied to outside of the stage carriage, it is impossible to determine standard load capacity, and use is not recommended.
・Horitontal-plane Z-axis stages (connector to be in up and down directioni)
・Goniometer stages
・Motorized rotary stages : KRW, KS402 Series

◆ Side vertical use is not recommended
・ Motorized rotary stage : KS451, KRE04360/06360 series, KS421 series (discontinued)

The specifications of each product are based on the conditions when installed on a flat surface.
Because the load applied to the stage guide changes, it is not possible to clearly define the load capacity when mounting with upside down.
However, we are showing the following informaiton only for reference.

◆ Possible to use if the load point is directly below the stage carrier (center).
The load capacity shall be less than one third (1/3) of the horizontal load capacity.
* When load is applied to outside of the stage carriage, it is impossible to determine standard load capacity,and use is not recommended.
・X-axis stages
・Horitontal-plane Z-axis stages (connector to be left-right position mounted on wall)
・Goniometer stages
・Motorized rotary stages : KRW, KS402 Series

◆ Possible to use if the load point is directly below the stage carrier (center).
The load capacity shall be less than one third (1/3) of the horizontal load capacity.
* When load is applied to outside of the stage carriage, it is impossible to determine standard load capacity, and use is not recommended.
・Horitontal-plane Z-axis stages (connector to be in up and down directioni)
・Goniometer stages
・Motorized rotary stages : KRW, KS402 Series

◆ Side vertical use is not recommended
・ Motorized rotary stage : KS451, KRE04360/06360 series, KS421 series (discontinued)

The KRE series can not be structually used in vertical direction or or in the condition that overhang load is applied from the stage carriage.

For vertical use, please select the KRW · KS402 series.
* Please handle with load capacity 1/3 or less of specifications also in that case.

There are clamps with M3 bolt for shielding plate on the stage carriage.
In the catalog drawing, it is close to the limit sensor switch box.
When the clamp is loosened, the protruding parts around stage carriage become movable.
When these protrusion parts are moved, the shielding plate can be adjusted.
Once the position of shielding plate is determined at any angle, tighten the clamp of the shielding plate on the stage carriage.

* Please apply the following torque for tightning the set bolt: KS402-75 : 5cN・m、KS402-100 : 25cN・m

The D70 can not perform origin return on a 2-sensor motorized stage.

When D70 controller was sold, we were not selling motorized stages without origin sensor.
Therefore, it does not support origin return operation for motorized stage with limit sensors only (without origin sensor).

■ 2-sensor stages
· KXL series (when origin sensor option is not selected)
· KRB series (The current products KRB04017C and KRB06011C have 3 sensor specifications.)

The D70 can not perform origin return on a 2-sensor motorized stage.

The slit origin sensor (ORG2 / ORG) is a type of origin sensor that mounts a disk with slits on the rotating shaft of the motor and detects the position of the slits with a photomicro sensor.

After detecting the origin sensor (ORG1 / NORG) of the stage main body, origin return is performed based on the step angle of the motor.

* Some products have only CW / CCW limit sensor depending on the model.
In that case, origin return is performed based on the limit sensor.

* Except for the KXS & KS102 series, the slit origin sensor can not be used with the standard cable supplied with the motorized stage.
A separate dedicated cable is required (D214-2- ● EA (K), D214-2- ● RA (K)).

There is no clear specification because it varies depending on conditions such as workpiece weight and shape, center of gravity position, ball screw lead and so on.
The adjustment will be made with about 100 msec to 200 msec as a reference.

It is possible by reducing the pulse volume from the controller.
However, as vibration is likely to occur if the speed is slow, please consider increasing the number of divisions with MS (micro step) if you want to drive the stage smoothly.

The catalog warranty value does not change even if certain conditions are relaxed.
Please use within the catalog guarantee value.

Even if the resolution becomes finer, the speed will not change as more pulses are sent to the driver.
However, since there is a pulse setting range of the controller, use it within that range.

The acceleration value changes depending on the setting of start pulse and acceleration / deceleration time.
Please see below as an example for selecting speed table No. 7 of our controller (DS102 series) and calculating the value when full step setting is made.

▼ Speed ​​table No. 7
--------------------------------------------
Starting speed : 1000pps
Driving speed : 10000pps
Acceleration/deceleration time : 100msec
--------------------------------------------
* The controller of Suruga Seiki sets acceleration / deceleration time instead of acceleration value.

【Calculation example】
When using a product with resolution : 1 μm / pulse, MAX speed : 10 mm / sec, it is set to reach from 1000 pps (starting speed) to 10000 pps (driving speed) in 100 msec (acceleration / deceleration time).
Find the driving speed when the speed rises up to one second (1000msec) at the same acceleration rate.

(Driving speed : 10000pps - Starting speed : 1000pps) ÷ Acceleration / deceleration time : 100msec
x 1000msec + Starting speed : 1000pps
= 91000pps Since

As the movement distance per pulse is 1μm, the driving speed at 91000pps is 91000μm (= 0.091m).
Therefore, the acceleration is "0.091 m / sec ^ 2."

◆ CAVE-X series
・driver : RKSD 503M-A (made by Oriental Motor)
・electromagnetic brake cable (3 m) / motor cable (3 m) set : CC030 VPFB (made by Oriental Motor)
・ sensor cable (2 m) : HR10AP-SA- 6-2

* The above cable is a fixed cable.

◆ PG series
・driver : RKSD 503M-A (made by Oriental Motor)
・electromagnetic brake cable (3 m) / motor cable (3 m) set : CC030 VPFB (made by Oriental Motor)
・sensor cable [limit / proximity origin] (2 m) : PG-H-ASSY 5-2000
(Slit origin sensor : PM-L25 (with 1 m cable)

* The above cable is a fixed cable.

◆ Slide Guide (KXS) Series
・Driver : RKSD 507 M-O (Oriental Motor Co., Ltd.)
・Electromagnetic Brake Cable (3 m) / motor cable (3 m) set : CC030 VPFB (made by Oriental Motor)
・sensor cable (2 m) : D214-1-2EK

* The above cable is a fixed cable.

◆ CAVE-X series
・driver : ARD-K (made by Oriental Motor)
・motor cable (3 m) : CC030VA2R2 (movable cable)
・sensor cable (2 m) : HR10AP-SA-6-2 (fixed cable)

◆ PG series
・driver : ARD-K (made by Oriental Motor) ・Motor cable (3 m) : CC030VA2R2 (movable cable)-Sensor
・cable [limit / proximity origin] (2 m) : PG-H-ASSY 5-2000 (fixed cable)

◆ Slide Guide (KXS) Series
・Driver : ARD-A (Oriental Motor Co., Ltd.)
・Motor cable (3 m) : CC030VAR (movable cable)
・Sensor cable (2 m) : D214-1-2 EK (fixed cable)

◆ CAVE-X(KXL) Series
・Amplifier：MR-J4-10A (Mitsubishi Electric Co., Ltd.)
・Motor cable (3 m)： SVPM-J3HF1-B-3-02S (movable cable)
・Encoder cable (3 m)： SVEM-J3HF1- B-3 (movable cable)
・sensor cable (2 m)：HR10AP-SA-6-2 (fixed cable)

◆ PG series
・Amplifier：MR-J4-10A (made by Mitsubishi Electric Corporation
・Motor cable (3 m)：SVPM -J3HF1-B-3-02S (Movable cable)
・Encoder cable (3 m)：SVEM-J3HF1-B-3 (Movable cable)
・Sensor cable [limit / proximity origin] (2 m)：PG-H-ASSY 5-2000 (Fixed cable)

◆ Slide guide (KXS) serie
・Amplifier：MR-J4-10A (made by Mitsubishi Electric Corporation)
・Motor cable (3 m)：SVPM-J3HF1-B-3-02S (movable cable)
・Encoder cable (3 m )：SVEM-J3HF1-B-3 (movable cable)
・Sensor cable (2 m)：D214-1-2 EK (fixed cable)

◆ Robot cable
finish Outline : 6.70 ± 0.15 mm
(Conductor configuration : 50 pieces / 0.08 mm [24 AWG], conductor outer diameter : approx. 0.65 mm)
Minimum bending radius : R33 mm

Normal cables are as follows.
◆ Normal cable
finish Outline : 6.70 ± 0.15 mm
(Conductor configuration : 40 pieces / 0.08 mm [24 AWG], conductor outer diameter : approx. 0.65 mm)
Minimum bending radius : R33 mm

In order to connect each stage to the driver, it is necessary to crimp using the special tool for the attached connector, but if you use this Cable set for DC24V input driver, you can omit the crimping operation.

Following 3 cables with connectors all 600mm) are included in the Cable set for DC24V input driver
1) Driver and DC power supply
2) Driver and motor
3) Driver and host controller

The other side of cables are left without connectors, so please connect them using a terminal block etc.

There is no problem with use at 24V. The same cable is used for both sensor power supply 5V / 24V.

It is a fixed cable.

When mounting in a place where the motorized stage itself moves, fix the connector so that the cable does not bend or twist.

■ Power Cable
Please use a power cable AWG22 (0.3mm ^ 2) cable.
■ I/O Cable
Please use the cable of I / O cable AWG24 (0.2mm ^ 2)-AWG22 (0.3mm ^ 2).

A dedicated crimping tool is required to assemble and wire the connector that comes with the DC24V Type Input Driver.
There is a product with 600 mm cable crimped to the connector attached to the driver.

Model : LCS04SD5 (Cable set for DC24V input driver)

A set of three for driver and DC power supply, driver and motor, and driver and host controller.
As we can just plug in driver, we can use immediately.
There is no need for laborious connector and wire crimping work, no special crimping tool,
and driver damage due to incorrect wiring can be prevented.

* The other side of the driver is processed with loose wires.
* A dedicated crimping tool is required to assemble and wire the connector included with the DC24V driver.

The use environment of the stage is as follows.
Operating environment : 10 to 50 ° C, 20 to 70% RH (non-condensing)
Recommended operating environment : 22 ± 5 ° C, 20 to 70% RH (non-condensing)

It is possible to use.
However, thermal expansion and contraction occur in the temperature change.
It is recommended to use at a constant temperature if it is used for precise measurement.
If the temperature change is large, let the stage adapt to that temperature for several hours before using.

The use environment of the stage is as follows.
Operating environment : 10 to 50 ° C, 20 to 70% RH (non-condensing)
Recommended operating environment : 22 ± 5 ° C, 20 to 70% RH (non-condensing)

It is possible to use.
However, thermal expansion and contraction occur in the temperature change.
It is recommended to use at a constant temperature if it is used for precise measurement.
If the temperature change is large, let the stage adapt to that temperature for several hours before using.

* We do not measure data for temperature change.

The use environment of the stage is as follows.
Operating environment : 10 to 50 ° C, 20 to 70% RH (non-condensing)
Recommended operating environment : 22 ± 5 ° C, 20 to 70% RH (non-condensing)

Please avoid using in the following places.
・A place with a lot of dust and dust (especially metal powder)
・A place exposed to direct sunlight and radiant heat
・A place close to fire
・A place where a corrosive gas or flammable gas is generated
・A place with water or oil
・A place where vibration or shock is transmitted
・A place with lots of salt and organic solvents

There is no vacuum compatible stage.
However, we provide grease replacement with Solva Specialty Polymers Japan Inc.,
Grease for vacuum, Fomblin YVAC2
You can order with the option code by adding "-L" at the end of the model number.

■ Not applicable products:
Motorized goniometer stages, Morotized rotary stages, and Motorized horizontal Z-axis stages are not compatible with grease replacement.

Our stages are not for clean environment.
However, we provide grease replacement (1:THK company-Clean environment grease-AFF / 2:NSK company-Clean environment grease-LG2).
You can order with the option code by adding "-J" or "-K" at the end of the model number.

▼ CAVE-X (Linear Ball Guide) series and KXS (Slide Guide) series
Except for bearing part, clean environment grease (AFF) is used as standard.

■ Not applicable products:
Motorized goniometer stages, Motorized rotary stages, and Motorized horizontal Z-axis stages are not compatible with grease replacement.

When used at high humidity, rust may occur in the guide part.
Therefore, we do not recommend such use.

Grease replacement for the motorized goniometer stages, the motorized rotary stages and the motorized horizontal Z-axis stage are not possible to order with the end code.

CAVE-X (Linear Ball Guide) series ,KXT series and Slide guide series use AFF grease as standard grease,
so "-J" option code at the end is unnecessary.

There is no provision for product life.
The actual usable period is difficult to estimate because it varies depending on the operating environment (temperature, humidity, etc.), how the load is applied, and the frequency of use.

There are no regular standards, regardless of the type of grease.
Depending on the driving conditions and guide type, check the grease condition about once a month and apply it as needed.

1) Remove old grease within visible range.
2) Apply to a syringe etc.
3) Make the full stroke operation several times.
4) Wipe out any excess grease.

Manufacturer name : Shell Lubricants Japan
Product name : Alvania Grease
Type : S2

* Please note that there is a possibility of changing without notice for product improvement.

Manufacturer name : THK
Product name : Grease for clean environment
Model : AFF

* Guides and ball screw parts are common

* There is a possibility to change without notice for product improvement, so please be aware

Manufacturer name : THK
Product name : Grease for clean environment
Model : AFF

* Guides and ball screw parts are common

* There is a possibility to change without notice for product improvement, so please be aware

■ Guide
manufacturer name : Shell Lubricants Japan
Product name : Alvania Grease
Type : S2

■ Ball Screw
Manufacturer Name : Kyodo
Yushi Product Name : Martemp PS
Type : No. 2

* Please note that there is a possibility of changing without notice for product improvement.

■ guide
Studio Name : Shell Lubricants Japan
Product Name : Alvania grease
Model : S2

■ worm gear
Studio Name : Shell Lubricants Japan
Product Name : Alvania grease
Model : HDX

* There is a possibility to change without notice for product improvement so please be advised

As it is a product with a 300 mm stroke, displacement (deflection) may occur when the upper shaft moves.
We recommend using the support guide if you want to stabilize the accuracy.
Model : APW 6016A -390A

* Please note that the stage with a cover is different from the model with APW 6019A -390A.

Depending on the content, it will be considered as a custom order.
Please contact our sales office for details.

Depending on the content, it will be considered as a custom order. Please contact our sales office for details.

If the 30 mm and 50 mm strokes of the PG series are assembled on XY as they are, they will interfere.

* The PMG430 / 530/650/750 series avoids interference through the intermediate plate.
Also, since the XY axis is a combination of L and R, the combination of L and R of PG does not have the same configuration as PMG.

Yes, it is possible.
Please contact our sales office with your desired product model, quantity, usage period and delivery address.

* Please note that we might not be able to prepare depending on the type and quantity.

The configuration of the Z axis stage is "X axis stage + Z axis bracket".
Therefore, each stage can be purchased separately as an X-axis stage.
Example. KZL06030-N1-C → "X-axis stage : KXL06030-N1-C" + "Z-axis bracket : AZTW60A-140"

The knob is used to move the stage manually when the power is off.
Depending on the product, when installing the motorized stage, it is necessary to turn the knob when the power is off and move the top plate until the bottom plate mounting holes come out.

Our motorized stage is for precise positioning of objects placed on a table.
It cannot be used for applications as a power source because there is a risk of deterioration of life, accuracy, failure or damage.

We will accept the actual machine if there is no problem other than the guide, then we will make a judgment on repair availability and present a repair estimate.
After receiving a repair instruction (ordering), we will start the repair work.

We will notify you of the symptoms, the shipping address, and the management number.
when sending out, so please contact our sales office for details.

As a rule, no expenses will be incurred.

In some cases, it may become clear that additional work is necessary during replacement / adjustment work.
In that case, we will inform you of the amount of change and the number of work days, and we will start work after accepting the start of additional work.

Mounting an object with a rough surface or attaching it to a surface with a rough surface may deform the stage surface and affect the accuracy. (The standard of flatness is within 10μm.)
Please check the flatness of the object and the mounting location.

A step out occurs when the motor is overloaded.
There are various concrete factors, but the following factors can be considered.
1) Acceleration speed is too fast
　→ Make the acceleration / deceleration setting slower.
2) The operating temperature is low and the grease is hardening
　→ Please warm up until the device temperature stabilizes.
3) Moment load is applied too much.
　→ Make sure that the load is as close to the center of the top of the stage as possible.

Could you confirm the logic setting of the limit sensor?
Could you confirm the type of limit sensor logic as A (normally open) again on the parameter setting screen?

* There is no problem with the origin sensor logic as B (normally closed).

If you are using the DS102/112 series controller, please check if the origin return type matches with the stage series.
Please refer to DS102/112 Operation Manual - section 3.9 (page 77).

If the acceleration / deceleration rate is too long or the startup speed is too high, it cannot bestopped in time after limit detection, and may interfere with the mechanical limit or shift the origin return position.

The origin return position differs by origin return type for the width of dog, as each origin return type has difference pattern as to which side of the CW / CCW edge of the sensor signal is detected.
Please insert an offset function after origin return function on the software, or select the origin return type which can detect in the opposite direction.
For further details, please refer to DS102/112 Operation Manual - section 3.9 (page 77).

The origin return position differs by origin return type for the width of dog, as each origin return type has difference pattern as to which side of the CW / CCW edge of the sensor signal is detected.
Please insert an offset function after origin return function on the software, or select the origin return type which can detect in the opposite direction.
For further details, please refer to DS102/112 Operation Manual - section 3.9 (page 77).

The answer is based on the assumption that the controller division number setting is FULL step (*).

pps means pulse / sec (read as pulse per sec).
The speed unit needs to be converted from [mm / sec] to [pulse / sec].

The resolution of the KXL06150-N2-FA (catalog value) is “4 μm (FULL)”.
In other words, it moves 4 μm per pulse.

1 [pulse] = 4 [μm]

Convert the velocity to the resolution unit [μm].

(Speed) = 25 [mm / sec] = 25,000 [μm / sec]

Calculate the number of pulses required to move 25,000 μm .

Number of pulses = 25,000 [μm] ÷ 4 [μm / pulse] = 6,250 [pulse]

Therefore, the speed of 25 mm / sec is equivalent to " 6,250 pulse / sec".

* What is FULL step?
Basic step angle determined by the motor structure, which is called FULL step.
For a 5-phase stepping motor, this is generally 0.72 degree.
Some motors have a basic step angle of 0.36 degree, so when calculating the stage resolution from the motor resolution, it is necessary to check the specifications of the motor used.

For FULL step, there is a technology to subdivide the moving angle per pulse by excitation method and current control.
These are called HALF step and MICRO step, and HALF is half of the basic step angle (0.36 deg per pulse when the basic step angle is 0.72 deg),
and micro step is 1/250 of the basic step angle (basic step angle) when it is 0.72 deg, it can be divided up to 0.00288 deg per pulse).
This makes it possible to reduce the resolution of the stage by reducing the resolution of the motor.

The actual stage movement involves sliding resistance and elastic deformation.
Therefore, even if the resolution of the motor is too small, the operation on the stage side does not necessarily follow.
In general, 1/8 to 1/20 division is the limit of stage tracking.

The direction of rotation of the motor represents the direction of movement of the stage.

* Direction of rotation of motor = Direction of rotation of motor shaft viewed from the stage table side(opposite to the knob of motor)

◆ CW (= ClockWise)
The direction in which the table (upper surface of the stage) moves to the opposite side of the motor.

◆ CCW (CounterClockWise)
The direction in which the table (upper surface of the stage) moves to the motor side.

The linear motion stage (XY stage) and goniometer stage are as described above.
In the case of the horizontal Z-axis stage and rotary stage, the moving direction of the stage top table is as follows.

CW direction : Direction in which the table (upper surface of the stage) goes up
CCW direction : Direction in which the table (upper surface of the stage) goes down

CW direction : Direction in which the table (upper surface of the stage) moves clockwise
CCW direction : Direction in which the table (upper surface of the stage) moves counterclockwise

・Start-up speed (Launch speed) : This is the speed setting when the stage starts.
・Acceleration / deceleration rate : The acceleration time that reaches the driving speed from the start-up speed, and the deceleration time until the stage stops from the driving speed.
・Driving speed : Speed to drive steadily.
・MAX speed : The maximum driving speed by setup, which can be different for each stage.

The amount by which the stage moves when a single pulse signal is sent.

This is the motor's electrical resolution for one pulse.
FULL : Full-step HALF : Half-step MS : Micro-step The resolution of the stage changes depending on the number of divisions.

◆ HALF (half step)
When half step is set, the movement amount per pulse is half compared to the case of full step.

◆ MS (Micro step)
We can do setting more detailed than Half step.
The division number setting is 16 patterns. (1,2,2.5,4,5,8,10,20,25,40,50,80,100,125,200,250)
* However, the actual following capability depends on the product. It is a standard of about 1/20in the linear motion stage. (Not covered by warranty)

◆ Pitching: Rotating movement around the axis perpendicular (left and right) to the traveling direction (front and back)
　→ Inclination of up and down
◆ Yawing: Rotating movement around the axis perpendicular (up and down) to the traveling direction (front and back)
　→ Inclination of left and right
◆ Rolling: Rotating movement around the axis of travelling direction (forward and backward)

◆ Straightness [unit: μm]
・ Maximum displacement amount (distance) in the horizontal and vertical directions with respect to the ideal movement axis

◆ Pitching [unit: ″]
・ Maximum displacement angle in the vertical swing direction

◆ Yawing [unit: ″]
・ Maximum displacement angle in the horizontal swing direction

◆ Eccentricity [unit: μm]]
・ Displacement of center axis of rotation in horizontal direction

◆ Runout [unit: μm]]
・ Maximum difference of displacement with respect to the reference plane when making one rotation with outer circumference as measurement point

◆ Parallelism [unit: μm]
・ Fix the stage on the reference plane.
・ A numerical value indicating how parallel the stage carriage and the reference plane are.

◆ Motion parallelism [unit: μm]
・ Fix the stage on the reference plane.
・ Place equipment for measuring the height with the reference plane on the stage carriage.
・ Maximum difference of measured values ​​by moving the stage

◆ Uni-directional positioning accuracy [unit: μm] A value representing "How much Point B has a possibility of positional deviation when X is moved from Point A to B?".

(Definition)
Send one-tenth of the total stroke, measure 10 points, and measure the maximum difference between measured values

◆ Repeatability positioning accuracy [unit: ± μm]
A value representing "When you want to go back and forth the same place, what level of position shift will occur?"

(Definition)
Repeat the positioning seven times from the same direction for any one point to measure the deviation from the actual stop position.
Calcurate a half of the maximum difference of the measured deviation.
Biggest value among the three points of the center and both ends of the stroke.

◆ Lost motion [unit: μm]
A value representing "What range of deviation will occur when trying to stop at the same place on both back and forth directions?"

(Definition)
Make positioning toward arbitrary point (point A) from point B.
The actual stop position at this time is the point C.
(* Positioning from the Positive direction)

Move in the opposite direction of point B. --- Point D

····· Make positioning from point D to point A.
The actual stop position at this point is the point E
(* Positioning from the Negative direction)

Repeat this measurement seven times each in the positive and negative directions.
Calcurate the difference between “average of seven measurements at point C” and “average of seven measurements at point E”.

The largest value when this is done at the 3 points (center of the stroke and both ends).

◆ Moment rigidity [Unit: "/ N · cm]
・The displacement angle per 1 N · cm when moment load is applied toward the stage carriage in the direction of the respective pitch, yaw & roll

* Based on the distance from the center of the stage carriage (upper surface)

* The moment rigidity value in the catalog is described as a representative actual measurement value.

The servo motor option (option code UA) uses Mitsubishi Electric AC servomotor (model: HG-KR053),
which is used a 22-bit encoder type and can be divided into 4194304 by one motor rotation (360 °).
*4194304 P/R

The stage moves 1 mm (1000 μm) with one rotation. Therefore, “1000 μm / 4194304 ≒ 0.0002384 μm” is the theoretical minimum resolution.

* It is different from actual following capability. It does not guarantee movement with the above resolution.

It is the direction which reflected the motorized stage in the mirror.
The cable connector and limit sensor position will be on the opposite side.

The acceleration is the rate of change of speed per unit time, and is expressed as “m / sec^2 (meters per secsec),“ etc.

If it comes to 10 mm / sec in 100 msec (= 0.1 seconds), the acceleration in this case is 10 mm / sec ÷ 100 msec (= 0.1 seconds) = 100 mm / sec^2 (0.1 m / sec^2)

* When the start pulse is 0 (zero)